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Wafer Fabrication

Wafer Fabrication

1st edition

Hardback (24 Sep 2018)

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Publisher's Synopsis

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

Book information

ISBN: 9783110486902
Publisher: De Gruyter
Imprint: De Gruyter
Pub date:
Edition: 1st edition
Language: English
Number of pages: 284
Weight: 675g
Height: 240mm
Width: 170mm
Spine width: 18mm