Hardback (14 Feb 1997) | German
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Behandelt Grundlagen der Plasmaphysik, des ionenuntersttzten Schichtwachstums und moderner Methoden der Oberflchen- und Dnnschichtanalyse sowie Verfahren der optischen Plasmadiagnostik.
| ISBN: | 9783540622659 |
| Publisher: | Springer |
| Imprint: | Springer |
| Pub date: | 14 Feb 1997 |
| Language: | German |
| Weight: | 804g |
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