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VLSI Electronics Microstructure Science. Vol. 8 Plasma Processing for VLSI

VLSI Electronics Microstructure Science. Vol. 8 Plasma Processing for VLSI

Book (07 Jun 1984)

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Book information

ISBN: 9780122341083
Publisher: Academic
Imprint: Academic
Pub date:
DEWEY: 621.38173
DEWEY edition: 18
Number of pages: 527
Weight: -1g