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VLSI Electronics Microstructure Science. Vol.21 Beam Processing Technologies

VLSI Electronics Microstructure Science. Vol.21 Beam Processing Technologies

Book (21 May 1989)

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Book information

ISBN: 9780122341212
Publisher: Academic Press
Imprint: Academic Press
Pub date:
DEWEY: 621.395
DEWEY edition: 20
Number of pages: 546
Weight: -1g