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Ultra Clean Processing of Semiconductor Surfaces XIV

Ultra Clean Processing of Semiconductor Surfaces XIV - Solid State Phenomena

Audio-visual / Multimedia Item (05 Oct 2018) | German

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Publisher's Synopsis

The 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018, Leuven, Belgium, September 3-5, 2018) was organized by IMEC and the scope of this symposium includes all issues related to contamination, cleaning and surface preparation in mainstream large-scale Integrated Circuit manufacturing. This collection will be interesting and useful for experts in the field of microelectronics.

Book information

ISBN: 9783035724172
Publisher: Trans Tech Publications Ltd
Imprint: Trans Tech Publications
Pub date:
Language: German
Number of pages: 356
Weight: -1g
Height: 142mm
Width: 125mm
Spine width: 10mm