Paperback (05 Oct 2018)
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The 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018, Leuven, Belgium, September 3-5, 2018) was organized by IMEC and the scope of this symposium includes all issues related to contamination, cleaning and surface preparation in mainstream large-scale Integrated Circuit manufacturing. This collection will be interesting and useful for experts in the field of microelectronics.
| ISBN: | 9783035714173 |
| Publisher: | Trans Tech Publications Ltd |
| Imprint: | Trans Tech Publications |
| Pub date: | 05 Oct 2018 |
| Language: | English |
| Number of pages: | 356 |
| Weight: | -1g |
| Height: | 240mm |
| Width: | 170mm |
| Spine width: | 18mm |
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