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Ultra Clean Processing of Semiconductor Surfaces VIII

Ultra Clean Processing of Semiconductor Surfaces VIII - Solid State Phenomena

Audio-visual / Multimedia Item (05 Mar 2008) | German

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    Publisher's Synopsis

    Volume is indexed by Thomson Reuters CPCI-S (WoS).This collection of 86 peer-reviewed papers covers all aspects of the use of ultra-clean technology for large-scale integration on semiconductors, and cleaning and contamination-control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing.

    Book information

    ISBN: 9783908454304
    Publisher: Trans Tech Publications Ltd
    Imprint: Trans Tech Publications
    Pub date:
    Language: German
    Number of pages: 400
    Weight: -1g
    Height: 142mm
    Width: 125mm
    Spine width: 10mm

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