Paperback (05 Mar 2008)
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Volume is indexed by Thomson Reuters CPCI-S (WoS).This collection of 86 peer-reviewed papers covers all aspects of the use of ultra-clean technology for large-scale integration on semiconductors, and cleaning and contamination-control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing.
| ISBN: | 9783908451464 |
| Publisher: | Trans Tech Publications Ltd |
| Imprint: | Trans Tech Publications |
| Pub date: | 05 Mar 2008 |
| Language: | English |
| Number of pages: | 400 |
| Weight: | 703g |
| Height: | 241mm |
| Width: | 171mm |
| Spine width: | 25mm |
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