Book (01 Jan 2003)
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In addition to 48 invited and contributed papers, this proceedings includes the four keynote papers, all of them given initially at the Third Symposium on ULSI Process Integration, which was held in April and May of 2003 in Paris, France. The papers are grouped into the major topics of process integration for memory devices, full process integratio
| ISBN: | 9781566773768 |
| Publisher: | Electrochemical Society |
| Imprint: | Electrochemical Society |
| Pub date: | 01 Jan 2003 |
| DEWEY: | 621.395 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 598 |
| Weight: | 961g |
| Height: | 241mm |
| Width: | 165mm |
| Spine width: | 38mm |
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