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Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography

Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography - Lasers and Electro-Optics Research and Technology

Paperback (01 Jul 2010)

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Publisher's Synopsis

This book presents and discusses a promising technology for fabrication of the one- and two-dimensional nanoperiodic structures on the solid surfaces by direct two- and four-beam standing wave pulsed laser modification. This method being developed extensively at present is very promising for application in nanoelectronics, data storage, integrated optics, and is considered to be a promising alternative to X-ray lithography in a wide range of applications.

About the Publisher

Nova Science Publishers

NOVA publishes a wide array of books and journals from authors around the globe.

Book information

ISBN: 9781616686741
Publisher: Nova Science Publishers Inc
Imprint: Nova Science Publishers
Pub date:
DEWEY: 621.3663
DEWEY edition: 22
Language: English
Number of pages: 87
Weight: 170g
Height: 229mm
Width: 155mm
Spine width: 7mm