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The Physics of Micro/nano-Fabrication

The Physics of Micro/nano-Fabrication - Microdevices

Revised and expanded Edition

Paperback (06 Dec 2010)

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Publisher's Synopsis

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Book information

ISBN: 9781441932211
Publisher: Springer US
Imprint: Springer
Pub date:
Edition: Revised and expanded Edition
DEWEY: 621.381
DEWEY edition: 22
Language: English
Number of pages: 670
Weight: 2530g
Height: 254mm
Width: 178mm
Spine width: 34mm