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The Physics of Micro/nano-Fabrication

The Physics of Micro/nano-Fabrication - Microdevices

1992

Hardback (31 Jan 1993)

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Publisher's Synopsis

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Book information

ISBN: 9780306441462
Publisher: Springer US
Imprint: Springer
Pub date:
Edition: 1992
DEWEY: 621.381
DEWEY edition: 20
Language: English
Number of pages: 650
Weight: 3290g
Height: 242mm
Width: 170mm
Spine width: 38mm