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The Eleventh Annual International Workshop on Micro Electro Mechanical Systems

The Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems : Proceedings, January 25-29, 1998, Heidelberg, Germany

Hardback (28 Feb 1998)

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    Publisher's Synopsis

    This text focuses on the design, modelling, fabrication, operation and applications of microelectromechanical devices, machines and systems which are constructed on the micrometre to millimetre scale.

    Book information

    ISBN: 9780780344129
    Publisher: Institute of Electrical and Electronics Engineers
    Imprint: Institute of Electrical and Electronics Engineers
    Pub date:
    DEWEY: 621.3
    DEWEY edition: 21
    Language: English
    Number of pages: 666
    Weight: -1g

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