Paperback (21 Oct 2020)
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Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.
| ISBN: | 9780128178508 |
| Publisher: | Elsevier Science |
| Imprint: | Elsevier |
| Pub date: | 21 Oct 2020 |
| DEWEY: | 620.50287 |
| DEWEY edition: | 23 |
| Language: | English |
| Number of pages: | 450 |
| Weight: | 910g |
| Height: | 235mm |
| Width: | 191mm |
| Spine width: | 23mm |
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