Book (01 Jan 1993)
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Compiles papers presented at a symposium on [title] during the MRS 1993 Spring Meeting, held April 13 to 15, in San Francisco. This year's symposium gave greater emphasis to silicon technology and particle cleaning issues. The 67 papers are grouped into sections on: overviews of surface preparation,
| ISBN: | 9781558992139 |
| Publisher: | Materials Research Society |
| Imprint: | Materials Research Society |
| Pub date: | 01 Jan 1993 |
| DEWEY: | 621.38152 |
| DEWEY edition: | 20 |
| Language: | English |
| Number of pages: | 518 |
| Weight: | 907g |
| Height: | 241mm |
| Width: | 158mm |
| Spine width: | 38mm |
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