Book (01 Dec 2011)
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Covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits, this title offers engineers detailed guidance in the entire substrate surface preparation process, from lapping and polishing... to specialized techniques and surface finishing.
| ISBN: | 9781608072132 |
| Publisher: | Artech House |
| Imprint: | Artech House |
| Pub date: | 01 Dec 2011 |
| DEWEY: | 621.3815 |
| DEWEY edition: | 23 |
| Language: | English |
| Number of pages: | 195 |
| Weight: | 392g |
| Height: | 237mm |
| Width: | 157mm |
| Spine width: | 16mm |
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