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Stress-Induced Phenomena in Metallization

Stress-Induced Phenomena in Metallization Seventh International Workshop on Stress-Induced Phenomena in Metallization, Austin, Texas, 14-16 June 2004 - AIP Conference Proceedings

2004

Hardback (01 Dec 2004)

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Publisher's Synopsis

These proceedings contain new research results and advances in basic understanding of stress-induced phenomena in metallization. Papers cover results on electromigration, thermal stresses and void formation in copper-low k interconnect structures.

Book information

ISBN: 9780735402256
Publisher: American Institute of Physics
Imprint: American Institute of Physics
Pub date:
Edition: 2004
DEWEY: 621.38152
DEWEY edition: 22
Language: English
Number of pages: 272
Weight: 1280g
Height: 235mm
Width: 155mm
Spine width: 17mm