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Silicon Nitride and Silicon Dioxide Thin Insulating Films

Silicon Nitride and Silicon Dioxide Thin Insulating Films Proceedings of the Fifth International Symposium - Proceedings / Electrochemical Society

Book (01 Jan 1999)

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Book information

ISBN: 9781566772280
Publisher: Electrochemical Society)
Imprint: Electrochemical Society)
Pub date:
DEWEY: 621.38152
DEWEY edition: 21
Language: English
Number of pages: 284
Weight: 521g
Height: 234mm
Width: 158mm
Spine width: 12mm