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Silicon Carbide--Materials, Processing and Devices

Silicon Carbide--Materials, Processing and Devices Symposium Held November 27-29, 2000, Boston, Massachusetts, U.S.A - Materials Research Society Symposium Proceedings

Book (01 Jan 2001)

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Publisher's Synopsis

The proceedings of the November 2000 symposium presents recent research on silicon carbide (SiC) for electronic device applications. The 78 papers deal with bulk growth, epitaxy, interfaces, materials, characterization, implantation and radiation damage, and metallization. Some of the topics are HTCVD growth of semi-insulating 4H-SiC crystals with

Book information

ISBN: 9781558995505
Publisher: Materials Research Society
Imprint: Materials Research Society
Pub date:
DEWEY: 621.38152
DEWEY edition: 21
Language: English
Number of pages: c655p
Weight: 884g
Height: 228mm
Width: 158mm
Spine width: 31mm