illustrated Edition
Hardback (28 Feb 2004) | English,Japanese
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Optical lithography for integrated circuits is undergoing a renaissance with the adoption of Resolution Enhancement Technology (RET). Some RET concepts have become routine in manufacturing. This volume gathers together seminal RET papers.
| ISBN: | 9780819451668 |
| Publisher: | SPIE Press |
| Imprint: | SPIE |
| Pub date: | 28 Feb 2004 |
| Edition: | illustrated Edition |
| DEWEY: | 621.381531 |
| DEWEY edition: | 22 |
| Language: | English,Japanese |
| Number of pages: | 875 |
| Weight: | 2313g |
| Height: | 283mm |
| Width: | 220mm |
| Spine width: | 53mm |
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