Publisher's Synopsis
Excerpt from Secondary Ion Mass Spectrometry: Proceedings of a Workshop on Secondary Ion Mass Spectrometry and Ion Microprobe Mass Analysis; Held at the National Bureau of Standards, Gaithersburg, MD., September 16-18, 1974
Microanalysis by means of secondary ion mass spectrometry is still in the initial phases of exploration. The observation of elements of low atomic number, the measurement of isotope ratios, and the shallow depth of sampling achievable with an ion microprobe or ion microscope are the outstandingly attractive features of this technique. They have already produced exciting results in diverse fields of application, including the study of distribution in depth of dopants and impurities in semiconductor materials, the characterization of the microscopic distribution of hydrogen and boron in alloys, and the analysis of microscopic particles. On the other hand, the experimental difficulties and instrumental limitations, the uncertainties involving theoretical models of ion-target interaction, and the serious problems in obtaining appropriate standards have vexed the analysts involved in the practice of ion probe microanalysis.
Since the cost of purchase and maintenance of the instrument is very high, the prospective user needs all the information he can obtain in order to assess the potential gains and the limitations of secondary ion mass spectrometry applied to his specific needs.
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