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Reliability of MEMS

Reliability of MEMS Testing of Materials and Devices - Advanced Micro & Nanosystems

New edition

Paperback (17 Apr 2013)

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    Publisher's Synopsis

    This edition of 'Reliability of MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, one of the most important hurdles to commercialization for microelectromechanical systems is covered in detail: the reliability of MEMS materials and devices.

    Book information

    ISBN: 9783527335015
    Publisher: Wiley-VCH
    Imprint: Wiley-VCH
    Pub date:
    Edition: New edition
    DEWEY: 621.381
    DEWEY edition: 23
    Language: English
    Number of pages: 324
    Weight: 644g
    Height: 241mm
    Width: 172mm
    Spine width: 16mm

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