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Reliability, Testing, and Characterization of MEMS/MOEMS

Reliability, Testing, and Characterization of MEMS/MOEMS 22-24 October 2001, San Francisco, USA - SPIE Proceedings Series

Book (01 Jan 2001)

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Book information

ISBN: 9780819442864
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.381
DEWEY edition: 22
Language: English
Number of pages: 296
Weight: -1g