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Reliability, Testing, and Characterization of MEMS/MOEMS

Reliability, Testing, and Characterization of MEMS/MOEMS 22-24 October 2001, San Francisco, USA - SPIE Proceedings Series

Book (01 Jan 2001)

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    Book information

    ISBN: 9780819442864
    Publisher: SPIE
    Imprint: SPIE
    Pub date:
    DEWEY: 621.381
    DEWEY edition: 22
    Language: English
    Number of pages: 296
    Weight: -1g

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