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Rapid Thermal and Integrated Processing: Volume 224

Rapid Thermal and Integrated Processing: Volume 224 - MRS Proceedings

Hardback (27 Sep 1991)

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    Publisher's Synopsis

    Rapid thermal processing is no longer a novelty in the semiconductor processing area. Fundamental issues related to RTP and its integration, including in-situ processing, are discussed in this volume of papers presented at the 1991 MRS Spring Meeting.

    About the Publisher

    Cambridge University Press

    Cambridge University Press dates from 1534 and is part of the University of Cambridge. We further the University's mission by disseminating knowledge in the pursuit of education, learning and research at the highest international levels of excellence.

    Book information

    ISBN: 9781558991187
    Publisher: Materials Research Society
    Imprint: Cambridge University Press
    Pub date:
    Language: English
    Number of pages: 528
    Weight: 1000g
    Height: 231mm
    Width: 157mm
    Spine width: 33mm

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