Hardback (28 Jul 1993)
Not available for sale
Out of stock
Interest in rapid thermal processing continues to grow as the demands on IC processing technology become more stringent. The papers that make up this volume were presented at a symposium of the 1993 Spring Meeting of the MRS in San Francisco. The volume is divided into eight parts: rapid thermal CVD of semiconductors and dielectrics; silicides and
Cambridge University Press dates from 1534 and is part of the University of Cambridge. We further the University's mission by disseminating knowledge in the pursuit of education, learning and research at the highest international levels of excellence.
| ISBN: | 9781558991996 |
| Publisher: | Cambridge University Press |
| Imprint: | Cambridge University Press |
| Pub date: | 28 Jul 1993 |
| Language: | English |
| Number of pages: | 446 |
| Weight: | 1000g |
| Height: | 236mm |
| Width: | 157mm |
| Spine width: | 27mm |
Sticky
Hardback
Published 11 Nov 2021
$1.86off
Things Fall Together
Hardback
Published 15 Jun 2021
Save $1.86
Introduction to the Thermodynam...
Hardback
Published 23 Jul 2024
$10.73off
Fundamentals of Turbulent Flows
Hardback
Published 12 Dec 2024
Save $10.73
$4.52off
Materials Selection in Mechanic...
Paperback
Published 09 Dec 2024
Save $4.52
$92.91off
Organic Electronics Materials a...
Hardback
Published 25 Jan 2024
Save $92.91
$97.94off
Design for Additive Manufacturing
Paperback
Published 13 Dec 2019
Save $97.94
$77.68off
Superconductors: Emerging Techn...
Hardback
Published 27 Sep 2022
Save $77.68
$39.13off
Aircraft Performance
Paperback
Published 05 Mar 2000
Save $39.13
