Publisher's Synopsis
Revised, updated, and expanded version of the 1985 edition. Over 50 researchers provide 200 reviews of properties and occasionally applications. All the various forms are studied, including glow-discharge deposited, sputtered, CVD, photo-CVD, evaporated, and ion-implanted. The alloys (a-SiC, a-SiGe, a-SiN, etc.), microcrystalline silicon, and super