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Process and Materials Characterization and Diagnostics in IC Manufacturing

Process and Materials Characterization and Diagnostics in IC Manufacturing 27-28 February 2003, Santa Clara, California, USA - SPIE Proceedings Series

Paperback (31 Jul 2003)

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Book information

ISBN: 9780819448460
Publisher: SPIE
Imprint: SPIE
Pub date:
Language: English
Number of pages: 222
Weight: 544g
Height: 266mm
Width: 209mm
Spine width: 12mm