Paperback (30 Sep 1999)
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These papers on the manufacture of integrated circuitry focus on the areas of process, equipment and materials control.
| ISBN: | 9780819434791 |
| Publisher: | SPIE |
| Imprint: | SPIE |
| Pub date: | 30 Sep 1999 |
| DEWEY: | 621.3815 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 310 |
| Weight: | -1g |
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