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Process Engineering Analysis in Semiconductor Device Fabrication

Process Engineering Analysis in Semiconductor Device Fabrication

International Edition

Paperback (01 Jun 1993)

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Publisher's Synopsis

Written primarily for chemical engineering students, this text is an extension of upper level chemical engineering courses. Covering a range of processes in semiconductor device fabrication, the authors try to present traditional chemical engineering methodology in a non-traditional context. The text covers such topics as crystal growth and filtration and contains over 300 worked examples and problems.

Book information

ISBN: 9780071127448
Publisher: McGraw-Hill Education (ISE Editions)
Imprint: McGraw-Hill Education (ISE Editions)
Pub date:
Edition: International Edition
DEWEY: 660.028
Number of pages: 800
Weight: 9600g
Height: 230mm