Hardback (29 Nov 1999)
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Out of stock
These papers cover semiconductor processing, academia and equipment development. Topics include: silicide and salicide; dielectrics; metallization; process integration; and interconnect systems.
| ISBN: | 9780780351745 |
| Publisher: | IEEE |
| Imprint: | IEEE |
| Pub date: | 29 Nov 1999 |
| DEWEY: | 621.38152 |
| DEWEY edition: | 22 |
| Language: | English |
| Number of pages: | 295 |
| Weight: | -1g |
| Height: | 279mm |
| Width: | 209mm |
| Spine width: | 25mm |
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