Book (01 Jan 1999)
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Contains papers from a May 1999 symposium, addressing topics in understanding and modeling of ion implantation and damage annealing, diffusion, segregation and aggregation of dopants and point defects, and back-end processing. Papers on ion implantation consider both fundamental and computationally
| ISBN: | 9781566772242 |
| Publisher: | Electrochemical Society |
| Imprint: | Electrochemical Society |
| Pub date: | 01 Jan 1999 |
| DEWEY: | 621.38152 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 229 |
| Weight: | 566g |
| Height: | 234mm |
| Width: | 158mm |
| Spine width: | 12mm |
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