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Plasma Synthesis and Etching of Electronic Materials

Plasma Synthesis and Etching of Electronic Materials Symposium Held November 27-30, 1984, Boston, Massachusetts, U.S.A - Materials Research Society Symposia Proceedings

Hardback (04 Apr 1985)

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Cambridge University Press

Cambridge University Press dates from 1534 and is part of the University of Cambridge. We further the University's mission by disseminating knowledge in the pursuit of education, learning and research at the highest international levels of excellence.

Book information

ISBN: 9780931837036
Publisher: Materials Research Society
Imprint: Cambridge University Press
Pub date:
DEWEY: 621.044
DEWEY edition: 19
Language: English
Number of pages: 522
Weight: 1000g
Height: 236mm
Width: 157mm
Spine width: 36mm