Hardback (01 Aug 1994)
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Out of stock
This latest volume of the well-known Physics of Thin Films Series includes four chapters that discuss high-density plasma sources for materials processing, electron cyclotron resonance and its uses, unbalancedmagnetron sputtering, and particle formation in thin film processing plasma.
| ISBN: | 9780125330183 |
| Publisher: | Elsevier Science |
| Imprint: | Academic Press |
| Pub date: | 01 Aug 1994 |
| Language: | English |
| Number of pages: | 328 |
| Weight: | 642g |
| Height: | 158mm |
| Width: | 236mm |
| Spine width: | 27mm |
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