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Physics of Thin Films Vol. 23 Modeling of Film Deposition for Microelectronic Applications

Physics of Thin Films Vol. 23 Modeling of Film Deposition for Microelectronic Applications Advances in Research and Development - Thin Films

Hardback (01 Sep 1997)

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Publisher's Synopsis

Significant progress has occurred during the last few years in device technologies and these are surveyed in this new volume. Included are Si/(Si-Ge) heterojunctions for high-speed integrated circuits, Schottky-barrier arrays in Si and Si-Ge alloys for infrared imaging, III-V quantum-well detector structures operated in the heterodyne mode for high-data-rate communications, and III-V heterostructures and quantum-wells for infrared emissions.

Book information

ISBN: 9780125330237
Publisher: Elsevier Science
Imprint: Academic Press
Pub date:
DEWEY: 621.38152
DEWEY edition: 21
Language: English
Number of pages: 350
Weight: 630g
Height: 229mm
Width: 152mm
Spine width: 22mm