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Physical and Technical Problems of SOI Structures and Devices

Physical and Technical Problems of SOI Structures and Devices - NATO Science Partnership Subseries: 3

Softcover reprint of the original 1st Edition 1995

Paperback (21 Oct 2012)

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Publisher's Synopsis

In Physical and Technical Problems of SOI Structures and Devices, specialists in silicon-on-insulator technology from both East and West meet for the first time, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in Russian and barely available to western scientists. Keynote lectures and state-of-the-art presentations give a wide-ranging panorama of the challenges posed by SOI materials and devices, material fabrication techniques, characterisation, device and circuit issues.

Book information

ISBN: 9789401040525
Publisher: Springer Netherlands
Imprint: Springer
Pub date:
Edition: Softcover reprint of the original 1st Edition 1995
Language: English
Number of pages: 290
Weight: 489g
Height: 240mm
Width: 160mm
Spine width: 16mm