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Photomask and X-Ray Mask Technology VI

Photomask and X-Ray Mask Technology VI 13-14 April, 1999, Yokohama, Japan - SPIE Proceedings Series

Paperback (31 Jul 1999)

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Book information

ISBN: 9780819432308
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.381531
DEWEY edition: 21
Language: English
Number of pages: 628
Weight: 1497g
Height: 279mm
Width: 216mm
Spine width: 38mm