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Papers from the Fourth International Plasma-Based Ion Implantation Workshop 2-4 June 1998, Dearborn, Michigan
Book (01 Jan 1999)
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Book information
| ISBN: | 9781563968846 |
| Publisher: | American Vacuum Society through the American Institute of Physics |
| Imprint: | American Vacuum Society through the American Institute of Physics |
| Pub date: | 01 Jan 1999 |
| DEWEY: | 621.381512 |
| DEWEY edition: | 21 |
| Language: | English |
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