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Papers from the First International Workshop on Plasma-Based Ion Implantation

Papers from the First International Workshop on Plasma-Based Ion Implantation 4-6 August 1993, University of Wisconsin--Madison, Madison, Wisconsin

Book (01 Jan 1994)

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    Book information

    ISBN: 9781563963445
    Publisher: Published for the American Vacuum Society by the American Institute of Physics
    Imprint: Published for the American Vacuum Society by the American Institute of Physics
    Pub date:
    DEWEY: 621.38152
    DEWEY edition: 21
    Language: English

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