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Optical Microlithography XXX

Optical Microlithography XXX 28 February-2 March 2017, San Jose, California, United States - Proceedings of SPIE

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Publisher's Synopsis

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Book information

ISBN: 9781510607453
Publisher: SPIE
Imprint: SPIE
Pub date:
Language: English
Number of pages: 452
Weight: -1g
Height: 279mm
Width: 216mm