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Optical Microlithography IX

Optical Microlithography IX 13-15 March, 1996, Santa Clara, California - SPIE Proceedings Series

Paperback (30 Apr 1997)

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Book information

ISBN: 9780819421029
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.381531
DEWEY edition: 21
Language: English
Number of pages: 914
Weight: 2154g
Height: 279mm
Width: 222mm
Spine width: 50mm