Delivery included to the United States

Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection

Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection 2-3 April 1987, The Hague, The Netherlands - Proceedings / SPIE

Paperback (01 Jan 1987)

Not available for sale

Out of stock

This service is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Book information

ISBN: 9780892528462
Publisher: SPIE-the International Society for Optical Engineering
Imprint: SPIE-the International Society for Optical Engineering
Pub date:
DEWEY: 621.38173
DEWEY edition: 19
Language: English
Number of pages: 211