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Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II

Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II 25-26 October 1995, Austin, Texas - Proceedings / SPIE--the International Society for Optical Engineering

Book (01 Jan 1995)

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Book information

ISBN: 9780819420046
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.38152
DEWEY edition: 22
Number of pages: 302
Weight: -1g