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On UV-Nanoimprint-Lithography as Direct Patterning Tool for Polymeric Microsystems

On UV-Nanoimprint-Lithography as Direct Patterning Tool for Polymeric Microsystems

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Book information

ISBN: 9783942710657
Publisher: TUDpress Verlag der Wissenschaften GmbH
Language: English
Weight: 318g
Height: 210mm
Width: 148mm
Spine width: 13mm