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Nanolithography and Surface Microscopy With Electron Beams

Nanolithography and Surface Microscopy With Electron Beams - Advances in Imaging and Electron Physics

Hardback (30 Oct 2024)

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Publisher's Synopsis

Nanolithography and Surface Microscopy with Electron Beams, Volume 231 merges two long-running serials, Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. The series features articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science, digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains. Specific chapters cover Introduction to inverse problems in electron microscopy, Directional sinogram inpainting for limited angle tomography, Strain tomography of crystals, FISTA with adaptive discretization, Total variation discretization, and Reconstruction with a Gaussian Dictionary.

Book information

ISBN: 9780443314629
Publisher: Elsevier Science
Imprint: Academic Press
Pub date:
DEWEY: 621.381531
DEWEY edition: 23
Language: English
Number of pages: 232
Weight: 756g
Height: 159mm
Width: 239mm
Spine width: 26mm