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Multilayer and Grazing Incidence X-ray/EUV Optics for Astronomy and Projection Lithography

Multilayer and Grazing Incidence X-ray/EUV Optics for Astronomy and Projection Lithography 19-22 July 1992, San Diego, California - SPIE Proceeding Series

Paperback (30 Jun 2006)

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Book information

ISBN: 9780819409157
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 522.6863
DEWEY edition: 20
Language: English
Number of pages: 702
Weight: 1633g
Height: 286mm
Width: 222mm
Spine width: 38mm