Publisher's Synopsis
These scientific papers discuss miniaturized systems with micro-optics and microelectromechanical systems (MEMS) from a range of perspectives.
Paperback (31 Aug 1999)
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These scientific papers discuss miniaturized systems with micro-optics and microelectromechanical systems (MEMS) from a range of perspectives.
ISBN: | 9780819434753 |
Publisher: | SPIE |
Imprint: | SPIE |
Pub date: | 31 Aug 1999 |
DEWEY: | 621.3693 |
DEWEY edition: | 21 |
Language: | English |
Number of pages: | 426 |
Weight: | 998g |
Height: | 267mm |
Width: | 210mm |
Spine width: | 25mm |