Hardback (15 May 1997) | German
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This completely revised edition of the first concise introduction to microsystems technology includes the latest trends of this emerging scientific discipline. Especially the chapters on silicium and LIGA technology are severely expanded. New topics include application aspects in medicine and health technology, lithography and electroplating.
| ISBN: | 9783527294053 |
| Publisher: | Wiley-VCH |
| Imprint: | Wiley-VCH |
| Pub date: | 15 May 1997 |
| Language: | German |
| Number of pages: | 453 |
| Weight: | 975g |
| Height: | 245mm |
| Width: | 178mm |
| Spine width: | 23mm |
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