Softcover reprint of the original 1st Edition 1989
Paperback (14 Jun 2012) | German
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Mikromechanik behandelt die physikalischen Grundlagen dieser jungen, zukunftsträchtigen Disziplin, ihre Technologie, aufbauend auf der Siliziumtechnologie, und ihre Nutzung in den verschiedensten Anwendungen der Bereiche Sensorik, Aktuatorik und integrierte Optoelektronik. Das Buch ist unentbehrlich für jeden, der sich intensiv mit der Mikromechanik befassen will; für den Studierenden ebenso wie für den Ingenieur in der Praxis oder den interessierten Laien.
| ISBN: | 9783642466229 |
| Publisher: | Springer Berlin Heidelberg |
| Imprint: | Springer |
| Pub date: | 14 Jun 2012 |
| Edition: | Softcover reprint of the original 1st Edition 1989 |
| Language: | German |
| Number of pages: | 501 |
| Weight: | 826g |
| Height: | 244mm |
| Width: | 170mm |
| Spine width: | 27mm |
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