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Microsystems Metrology and Inspection

Microsystems Metrology and Inspection 15-16 June 1999, Munich, Germany - SPIE Proceedings Series

Paperback (30 Sep 1999)

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Book information

ISBN: 9780819433114
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.381
DEWEY edition: 21
Language: English
Number of pages: 186
Weight: -1g