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Micron and Submicron Integrated Circuit Metrology

Micron and Submicron Integrated Circuit Metrology August 22-23, 1985, San Diego, California - Proceedings of SPIE--the International Society for Optical Engineering

Paperback (01 Jan 1985)

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Book information

ISBN: 9780892526000
Publisher: SPIE--International Society for Optical Engineering
Imprint: SPIE--International Society for Optical Engineering
Pub date:
DEWEY: 621.38173
DEWEY edition: 19
Language: English
Number of pages: 223